Single layer thin photoresist soft etch mask for MEMS...

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Microsystem Technologies 2017 / 10

Single layer thin photoresist soft etch mask for MEMS applications

Joyce, Robin, Panwar, Deepak Kumar, Shakil, Moh., Varghese, Soney, Akhtar, Jamil
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-017-3609-0
Date:
October, 2017
File:
PDF, 2.13 MB
english, 2017
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