Temperature-dependent interface characteristic of silicon...

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Applied Surface Science 2017 / 10

Temperature-dependent interface characteristic of silicon wafer bonding based on an amorphous germanium layer deposited by DC-magnetron sputtering

Ke, Shaoying, Lin, Shaoming, Ye, Yujie, Mao, Danfeng, Huang, Wei, Xu, Jianfang, Li, Cheng, Chen, Songyan
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Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2017.10.150
Date:
October, 2017
File:
PDF, 267 KB
english, 2017
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