Fabrication of high edge-definition steel-tape gratings for...

Review of Scientific Instruments 2017 / 10 Vol. 88; Iss. 10

Fabrication of high edge-definition steel-tape gratings for optical encoders

Ye, Guoyong, Liu, Hongzhong, Yan, Jiawei, Ban, Yaowen, Fan, Shanjin, Shi, Yongsheng, Yin, Lei
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Volume:
88
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4992028
Date:
October, 2017
File:
PDF, 16.13 MB
english, 2017
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