Effects of isopropyl alcohol and acetic acid on surface...

Micro & Nano Letters 2017 / 10 Vol. 12; Iss. 10

Effects of isopropyl alcohol and acetic acid on surface roughness of Z-cut quartz etched by ammonium bifluoride solution

Zhang, Zhaoyun, Su, Wei, Tang, Bin, Xu, Wei, Xiong, Zhuang, Gao, Yang, Peng, Bo
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Volume:
12
Language:
english
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2017.0089
Date:
October, 2017
File:
PDF, 303 KB
english, 2017
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