Surface preparation and patterning by nano imprint...

Semiconductor Science and Technology 2017 / 11 Vol. 32; Iss. 11

Surface preparation and patterning by nano imprint lithography for the selective area growth of GaAs nanowires on Si(111)

Küpers, Hanno, Tahraoui, Abbes, Lewis, Ryan B, Rauwerdink, Sander, Matalla, Mathias, Krüger, Olaf, Bastiman, Faebian, Riechert, Henning, Geelhaar, Lutz
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
32
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/1361-6641/aa8c15
Date:
November, 2017
File:
PDF, 1.62 MB
english, 2017
Conversion to is in progress
Conversion to is failed