Chemical-Mechanical Planarization of Low-k Polymers for...

Journal of Electronic Packaging 2002 Vol. 124; Iss. 4

Chemical-Mechanical Planarization of Low-k Polymers for Advanced IC Structures

Borst, Christopher L., Thakurta, Dipto G., Gill, William N., Gutmann, Ronald J.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
124
Year:
2002
Language:
english
Journal:
Journal of Electronic Packaging
DOI:
10.1115/1.1510138
File:
PDF, 432 KB
english, 2002
Conversion to is in progress
Conversion to is failed