Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2017 / 11 Vol. 35; Iss. 6
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Deposition of Mo/Si multilayers onto MEMS micromirrors and its utilization for extreme ultraviolet maskless lithography
Chkhalo, Nikolay, Polkovnikov, Vladimir, Salashchenko, Nikolay, Toropov, MikhailVolume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4995369
Date:
November, 2017
File:
PDF, 989 KB
english, 2017