Impact of line edge roughness on the performance of 14-nm...

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Superlattices and Microstructures 2017 / 11

Impact of line edge roughness on the performance of 14-nm FinFET: Device-circuit Co-design

Rathore, Rituraj Singh, Rana, Ashwani K.
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Language:
english
Journal:
Superlattices and Microstructures
DOI:
10.1016/j.spmi.2017.10.038
Date:
November, 2017
File:
PDF, 2.36 MB
english, 2017
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