Deposition of micro crystalline silicon films using...

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Thin Solid Films 2017 / 10

Deposition of micro crystalline silicon films using microwave plasma enhanced chemical vapor deposition

Altmannshofer, Stephan, Miller, Bastian, Holleitner, Alexander W., Boudaden, Jamila, Eisele, Ignaz, Kutter, Christoph
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2017.10.031
Date:
October, 2017
File:
PDF, 1.59 MB
english, 2017
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