Mechanical properties of titanium nitride films obtained by...

Journal of Physics Conference Series 2017 / 07 Vol. 872

Mechanical properties of titanium nitride films obtained by reactively sputtering with hot target

Babinova, R V, Smirnov, V V, Useenov, A S, Kravchuk, K S, Gladkikh, E V, Shapovalov, V I, Mylnikov, I L
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Volume:
872
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/872/1/012035
Date:
July, 2017
File:
PDF, 450 KB
english, 2017
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