[ASME ASME 2002 International Mechanical Engineering Congress and Exposition - New Orleans, Louisiana, USA (November 17–22, 2002)] Microelectromechanical Systems - Design and Fabrication of an Annular High Frequency Resonator
Lee, Ki Bang, Ryder, Steve, Lee, Chih-Chen, Lin, LiweiVolume:
2002
Year:
2002
Language:
english
DOI:
10.1115/imece2002-33387
File:
PDF, 626 KB
english, 2002