Experimental Study of PVD Cu/CVD Co Bilayer Dissolution for...

ECS Transactions 2017 / 08 Vol. 80; Iss. 4

Experimental Study of PVD Cu/CVD Co Bilayer Dissolution for BEOL Cu Interconnect Applications

Sun, Xiaoxuan, Peethala, Brown, Hopstaken, Marinus, Hu, Chao-kun, Mclaughlin, Paul S, van der Straten, O., Demarest, James, Motoyama, K., Nogami, Takeshi, Lin, Xuan, Zhang, Xunyuan, Kelly, James
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
80
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/08004.0297ecst
Date:
August, 2017
File:
PDF, 390 KB
english, 2017
Conversion to is in progress
Conversion to is failed