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Understanding the microstructures of triangular defects in 4H-SiC homoepitaxial
Guo, Jianqiu, Yang, Yu, Raghothamachar, Balaji, Kim, Taejin, Dudley, Michael, Kim, JungyuVolume:
480
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2017.10.015
Date:
December, 2017
File:
PDF, 3.87 MB
english, 2017