Characterization and optimization of sputtered AlN buffer layer on r -plane sapphire substrate to improve the crystalline quality of nonpolar a -plane GaN
Jinno, Daiki, Otsuki, Shunya, Sugimori, Shogo, Daicho, Hisayoshi, Iwaya, Motoaki, Takeuchi, Tetsuya, Kamiyama, Satoshi, Akasaki, IsamuVolume:
480
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2017.10.018
Date:
December, 2017
File:
PDF, 3.37 MB
english, 2017