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Atomic layer deposition for TiO 2 and TiN nanometer films
Insepov, Zeke, Ainabayev, Ardak, Bozheyev, Farabi, Zhuldassov, Abat, Lukasheva, Maria, Tynyshtykbaev, Kurbangali B.Volume:
4
Year:
2017
Language:
english
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2017.09.075
File:
PDF, 1.28 MB
english, 2017