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Formation of cross-cutting structures with different porosity on thick silicon wafers
Yuzova, Vera A., Merkushev, Fedor F., Lyaykom, Eugene A.Language:
english
Journal:
Modern Electronic Materials
DOI:
10.1016/j.moem.2017.09.003
Date:
September, 2017
File:
PDF, 858 KB
english, 2017