Influence of probe dynamic characteristics on the scanning speed for white light interference based AFM
Yang, Wenjun, Liu, Xiaojun, Lu, Wenlong, Guo, XiaotingLanguage:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2017.09.005
Date:
September, 2017
File:
PDF, 899 KB
english, 2017