Effects of post-deposition annealing on sputtered SiO 2 /4H-SiC metal-oxide-semiconductor
Lee, Suhyeong, Kim, Young Seok, Kang, Hong Jeon, Kim, Hyunwoo, Ha, Min-Woo, Kim, Hyeong JoonLanguage:
english
Journal:
Solid-State Electronics
DOI:
10.1016/j.sse.2017.10.001
Date:
October, 2017
File:
PDF, 913 KB
english, 2017