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Nanoscale Calibration Standards and Methods (Dimensional and Related Measurements in the Micro- and Nanometer Range) || Measurement of High-Resolution Interferential Encoders Using the PTB Nanometer Comparator
Wilkening, Günter, Koenders, LudgerVolume:
10.1002/35
Year:
2005
Language:
english
DOI:
10.1002/3527606661.ch30
File:
PDF, 223 KB
english, 2005