Al-Si-N thin films deposited by laser ablation: Effect of...

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Materials Research Bulletin 2017 / 10

Al-Si-N thin films deposited by laser ablation: Effect of plasma parameters on mechanical and optical properties

Rivera, L.P., Camps, Enrique, Muhl, Stephen, Basurto, Rafael, Zeinert, A.
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Language:
english
Journal:
Materials Research Bulletin
DOI:
10.1016/j.materresbull.2017.10.044
Date:
October, 2017
File:
PDF, 1.17 MB
english, 2017
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