Fast preparation of (111)-oriented β-SiC films without...

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  • Fast preparation of (111)-oriented β-SiC films without...
Journal of the American Ceramic Society 2017 / 10

Fast preparation of (111)-oriented β-SiC films without carbon formation by laser chemical vapor deposition from hexamethyldisilane (HMDS) without H 2

Xu, Qingfang, Zhu, Peipei, Sun, Qingyun, Tu, Rong, Zhang, Song, Yang, Meijun, Li, Qizhong, Shi, Ji, Li, Haiwen, Zhang, Lianmeng, Goto, Takashi, Han, Mingxu, Yan, Jiasheng, Li, Shusen
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Language:
english
Journal:
Journal of the American Ceramic Society
DOI:
10.1111/jace.15315
Date:
October, 2017
File:
PDF, 1.15 MB
english, 2017
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