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[ASME ASME 2016 International Mechanical Engineering Congress and Exposition - Phoenix, Arizona, USA (Friday 11 November 2016)] Volume 10: Micro- and Nano-Systems Engineering and Packaging - CPI Stress Induced Carrier Mobility Shift in Advanced Silicon Nodes
Sukharev, Valeriy, Choy, Jun-Ho, Kteyan, Armen, Hovsepyan, Henrik, Muehle, Uwe, Zschech, Ehrenfried, Radojcic, RikoYear:
2016
Language:
english
DOI:
10.1115/imece2016-65171
File:
PDF, 3.36 MB
english, 2016