[IEEE 2017 Joint International Symposium on e-Manufacturing and Design Collaboration (eMDC) & Semiconductor Manufacturing (ISSM) - Hsinchu, Taiwan (2017.9.15-2017.9.15)] 2017 Joint International Symposium on e-Manufacturing and Design Collaboration (eMDC) & Semiconductor Manufacturing (ISSM) - The productivity opportunities by applying machine learning algorithms in a fab
Lai, C.Y., Tsai, P.F., Chang, Steven, Wang, Y.C., Teng, L.W.Year:
2017
Language:
english
DOI:
10.23919/ISSM.2017.8089089
File:
PDF, 231 KB
english, 2017