AFM tip-based nanomachining with increased cutting speed at the tool-workpiece interface
Geng, Yanquan, Brousseau, Emmanuel B., Zhao, Xuesen, Gensheimer, Micheal, Bowen, Christopher R.Language:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2017.10.009
Date:
October, 2017
File:
PDF, 1.64 MB
english, 2017