[ASME 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems - Sanya, Hainan, China (January 10–13, 2007)] First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B - A Bulk Micromachined Si-on-Glass Tunneling Accelerometer
Miao, Min, Hu, Qifang, Hao, Yilong, Dong, Haifeng, Zhang, HaixiaYear:
2007
Language:
english
DOI:
10.1115/MNC2007-21349
File:
PDF, 1011 KB
english, 2007