Blue-laser scanned imaging system using positioning marks...

Japanese Journal of Applied Physics 2017 / 05 Vol. 56; Iss. 5

Blue-laser scanned imaging system using positioning marks formed on an optical disk substrate

Shima, Takayuki, Wang, Xiaomin, Shiramizu, Hideyuki, Fujimaki, Makoto, Awazu, Koichi, Ohki, Yoshimichi
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Volume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.058003
Date:
May, 2017
File:
PDF, 2.12 MB
english, 2017
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