Effects of gas temperature, pressure, and discharge power on nucleation time of nano-particles in low pressure C 2 H 2 /Ar RF plasmas
Lin, Jiashu, Orazbayev, Sagi, Hénault, Marie, Lecas, Thomas, Takahashi, Kazuo, Boufendi, LaïfaVolume:
122
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5007951
Date:
October, 2017
File:
PDF, 1.17 MB
english, 2017