[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung, Taiwan (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Edge-anchored mode-matched micromachined gyroscopic disk resonator
Zou, Xudong, Zhao, Chun, Seshia, Ashwin A.Year:
2017
Language:
english
DOI:
10.1109/TRANSDUCERS.2017.7994509
File:
PDF, 1.58 MB
english, 2017