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[IEEE 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2017.5.15-2017.5.18)] 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Kelvin probe force microscopy of gate stack metal alloy films
Hurst, Jeffrey, Lam, Kin-Sang, Bordelon, Clint, Wilson, Michael, Smith, Brian, Phillips, ShaneYear:
2017
Language:
english
DOI:
10.1109/asmc.2017.7969246
File:
PDF, 306 KB
english, 2017