Crystal structure and mechanical properties of titanium nitride films synthesized by magnetron sputtering with a hot target
Shapovalov, V. I., Useinov, A. S., Kravchuk, K. S., Gladkikh, E. V., Kozin, A. A., Smirnov, V. V.Volume:
43
Language:
english
Journal:
Glass Physics and Chemistry
DOI:
10.1134/S1087659617050157
Date:
September, 2017
File:
PDF, 192 KB
english, 2017