Effects of period number and sputtering time on optical...

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Journal of Materials Science: Materials in Electronics 2017 / 10

Effects of period number and sputtering time on optical properties of Si/Ge multilayer films deposited by magnetron sputtering

Liu, Jinsong, Li, Ziquan, Wu, Zhengying, Zhu, Kongjun, Xi, Qingyang, Li, Jun, He, Mingxia
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Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-017-8080-2
Date:
October, 2017
File:
PDF, 2.37 MB
english, 2017
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