Influence of oxygen on the performance of indium titanium zinc oxide UV sensors fabricated via RF sputtering
Hsu, Ming-Hung, Chang, Sheng-Po, Chang, Shoou-Jinn, Wu, Wei-Ting, Li, Jyun-YiVolume:
74
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2017.10.031
Date:
February, 2018
File:
PDF, 1.90 MB
english, 2018