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ACS Applied Materials & Interfaces 2017 / 11

Selective deposition of multiple sensing materials on Si nanobelt devices through plasma-enhanced chemical vapor deposition and device-localized Joule heating

Lin, Ru Zheng, Cheng, Kuang-Yang, Pan, Fu-Ming, Sheu, Jeng-Tzong
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Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.7b13896
Date:
November, 2017
File:
PDF, 1.27 MB
english, 2017
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