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[ASME ASME 2003 International Mechanical Engineering Congress and Exposition - Washington, DC, USA (November 15–21, 2003)] Microelectromechanical Systems - Crystallization of Sputtered NiTi Films
Vestel, Michael J., Grummon, David S., Pisano, Albert P.Volume:
2003
Year:
2003
Language:
english
DOI:
10.1115/imece2003-41216
File:
PDF, 498 KB
english, 2003