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Preparation of tungsten carbide and tungsten nitride by CVD method using fluoride.
WATANABE, Nobuatsu, TERADA, Tsuyoshi, CHONG, Yong-bo, NAKAJIMA, TsuyoshiYear:
1985
Journal:
NIPPON KAGAKU KAISHI
DOI:
10.1246/nikkashi.1985.1812
File:
PDF, 4.34 MB
1985