Study of ZrO 2 thin films deposited at glancing angle by...

Thin Solid Films 2018 / 01 Vol. 645

Study of ZrO 2 thin films deposited at glancing angle by radio frequency magnetron sputtering under varying substrate rotation

Tokas, R.B., Jena, S., Misal, J.S., Rao, K.D., Polaki, S.R., Pratap, C., Udupa, D.V., Thakur, S., Kumar, Sanjiv, Sahoo, N.K.
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Volume:
645
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2017.11.007
Date:
January, 2018
File:
PDF, 1.52 MB
english, 2018
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