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Investigation of parasitic resistance and capacitance effects in nanoscaled FinFETs and their impact on static random-access memory cells
Huang, Bo-Rong, Meng, Fan-Hsuan, King, Ya-Chin, Lin, Chrong JungVolume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.04CD11
Date:
April, 2017
File:
PDF, 1.79 MB
english, 2017