Numerical study on the gas heating mechanism in pulse-modulated radio-frequency glow discharge
Wang, Qi, Yu, Xiao-Li, Wang, De-ZhenVolume:
26
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/26/3/035201
Date:
March, 2017
File:
PDF, 474 KB
english, 2017