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An Epitaxy Transfer Process for Heterogeneous Integration of Submillimeter-Wave GaAs Schottky Diodes on Silicon Using SU-8
Xie, Linli, Nadri, Souheil, Alijabbari, Naser, Cyberey, Michael E., Bauwens, Matthew F., Lichtenberger, Arthur W., Barker, N. Scott, Weikle, Robert M.Volume:
38
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2017.2756920
Date:
November, 2017
File:
PDF, 1.60 MB
english, 2017