AIP Conference Proceedings [Author(s) 2ND INTERNATIONAL CONFERENCE ON MATERIALS SCIENCE, RESOURCE AND ENVIRONMENTAL ENGINEERING (MSREE 2017) - Hubei Province, China (27–29 October 2017)] - Research and preparation of ultra purity silicon tetrachloride
Wan, Ye, Zhao, Xiong, Yan, Dazhou, Yang, Dian, Li, Yunhao, Guo, ShuhuVolume:
1890
Year:
2017
Language:
english
DOI:
10.1063/1.5005228
File:
PDF, 374 KB
english, 2017