Hot target magnetron sputtering for ferromagnetic films deposition
Sidelev, Dmitrii V., Bleykher, Galina A., Grudinin, Vladislav A., Krivobokov, Valery P., Bestetti, Massimiliano, Syrtanov, Maxim S., Erofeev, Evgenii V.Volume:
334
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2017.11.024
Date:
January, 2018
File:
PDF, 2.76 MB
english, 2018