Special issue on transducers and micro-nano technology
Tsuchiya, Toshiyuki, Konishi, SatoshiVolume:
27
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aa70d4
Date:
July, 2017
File:
PDF, 186 KB
english, 2017