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Oven controlled N ++ [1 0 0] length-extensional mode silicon resonator with frequency stability of 1 ppm over industrial temperature range
You, Weilong, Pei, Binbin, Sun, Ke, Zhang, Lei, Yang, Heng, Li, XinxinVolume:
27
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aa7d1c
Date:
October, 2017
File:
PDF, 1.96 MB
english, 2017