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A holographic method of the quantitative measurement of photolithographic replicas of thick raised surface defects
Budnikov, N. S., Dudenkova, V. V., Kotomina, V. E., Morozov, O. A., Semenov, V. V.Volume:
43
Language:
english
Journal:
Technical Physics Letters
DOI:
10.1134/s1063785017060050
Date:
June, 2017
File:
PDF, 397 KB
english, 2017