Interdisciplinary considerations on the design of MEMS...

Sensors and Actuators A: Physical 2018 / 01 Vol. 269

Interdisciplinary considerations on the design of MEMS actuators from a perspective of their optimality

Plander, Ivan, Stepanovsky, Michal
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Volume:
269
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2017.11.007
Date:
January, 2018
File:
PDF, 1.22 MB
english, 2018
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