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Direct Fabrication of Inkjet-Printed Dielectric Film for Metal–Insulator–Metal Capacitors
Cho, Cheng-Lin, Kao, Hsuan-ling, Wu, Yung-Hsien, Chang, Li-Chun, Cheng, Chun-HuLanguage:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-017-5832-y
Date:
October, 2017
File:
PDF, 2.14 MB
english, 2017