AMORPHOUS VANADIUM DIOXIDE: THE RESIST FOR ELECTRON-BEAM...

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Surface Review and Letters 2017 / 10

AMORPHOUS VANADIUM DIOXIDE: THE RESIST FOR ELECTRON-BEAM LITHOGRAPHY

STEFANOVICH, GENRIKH, VELICHKO, ANDREY, PERGAMENT, ALEXANDER, BORISKOV, PETER
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Language:
english
Journal:
Surface Review and Letters
DOI:
10.1142/S0218625X18501184
Date:
October, 2017
File:
PDF, 3.35 MB
english, 2017
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