Design and characterization of a monolithic CMOS-MEMS...

Sensors and Actuators A: Physical 2018 / 01 Vol. 269

Design and characterization of a monolithic CMOS-MEMS mutually injection-locked oscillator for differential resonant sensing

Prache, Pierre, Juillard, Jérôme, Ferreira, Pietro Maris, Barniol, Núria, Riverola, Marti
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Volume:
269
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2017.11.025
Date:
January, 2018
File:
PDF, 2.94 MB
english, 2018
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