Graphene as plasma-compatible blocking layer material for...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2018 / 01 Vol. 36; Iss. 1

Graphene as plasma-compatible blocking layer material for area-selective atomic layer deposition: A feasibility study for III-nitrides

Deminskyi, Petro, Haider, Ali, Kovalska, Evgeniya, Biyikli, Necmi
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.5003421
Date:
January, 2018
File:
PDF, 3.77 MB
english, 2018
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