Kinetics of Silane Decomposition in High-Pressure Confined...

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Industrial & Engineering Chemistry Research 2017 / 11

Kinetics of Silane Decomposition in High-Pressure Confined Chemical Vapor Deposition of Hydrogenated Amorphous Silicon

Motevalian, Seyed Pouria, Aro, Stephen C., Cheng, Hiu Y., Day, Todd d., van Duin, Adri C.T., Badding, John V., Borhan, Ali
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Language:
english
Journal:
Industrial & Engineering Chemistry Research
DOI:
10.1021/acs.iecr.7b03515
Date:
November, 2017
File:
PDF, 636 KB
english, 2017
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